Nitride formation during reactive sputter deposition of multi-principal element alloys in argon/nitrogen mixtures
Diederik Depla, Robin Dedoncker, Koen Strijckmans
Topics & Concepts
NitrideSputteringElectronegativityNitrogenTexture (cosmology)Analytical Chemistry (journal)Sputter depositionArgonAlloyMaterials scienceDeposition (geology)MetallurgyChemistryThin filmInorganic chemistryLayer (electronics)Composite materialNanotechnologyEnvironmental chemistryOrganic chemistrySedimentComputer scienceImage (mathematics)PaleontologyArtificial intelligenceBiologyMetal and Thin Film MechanicsHigh-Temperature Coating BehaviorsIon-surface interactions and analysis