Study on nanometer cutting mechanism of single crystal silicon at different temperatures
Guigen Ye, Peng Zhang, Jiansheng Zhang, Yi Zhang, Xiaoguang Huang
Topics & Concepts
Materials scienceComposite materialChip formationSiliconMachiningShear stressShear (geology)Slip (aerodynamics)MetallurgyTool wearThermodynamicsPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization