Al/F codoping effect on the structural, electrical, and optical properties of ZnO films grown via atomic layer deposition
Kyung-Mun Kang, Yue Wang, Minjae Kim, Chan Lee, Hyung‐Ho Park
Topics & Concepts
Materials sciencePassivationDopingLayer (electronics)Atomic layer depositionElectrical resistivity and conductivitySiliconElectron mobilityThin filmDeposition (geology)AluminiumZincAnalytical Chemistry (journal)NanotechnologyOptoelectronicsChemistryMetallurgyEngineeringPaleontologySedimentBiologyChromatographyElectrical engineeringZnO doping and propertiesGas Sensing Nanomaterials and SensorsCopper-based nanomaterials and applications