An insight into growth transition in AlN epitaxial films produced by metal-organic chemical vapour deposition at different growth temperatures
Mohd Ann Amirul Zulffiqal Md Sahar, Z. Hassan, S.S. Ng, Nur Atiqah Hamzah, Yusnizam Yusuf, Н. Н. Новикова, V. A. Yakovlev, С. А. Климин
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyChemical vapor depositionEpitaxySapphireNitrideAluminiumThin filmAluminium nitrideSubstrate (aquarium)Analytical Chemistry (journal)CrystallographyOptoelectronicsLayer (electronics)NanotechnologyComposite materialOpticsChemistryLaserOceanographyPhysicsGeologyChromatographyGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesGa2O3 and related materials