Influence of tantalum's crystal phase growth on the microstructural, electrical and mechanical properties of sputter-deposited tantalum thin film layer
Rhonira Latif, Muhammad Fahmi bin Jaafar, Mohd Faizal Aziz, Ahmad Rifqi Md Zain, Jumril Yunas, Burhanuddin Yeop Majlis
Topics & Concepts
TantalumMaterials scienceSputteringLayer (electronics)MetallurgySputter depositionPhase (matter)Thin filmCrystal (programming language)Composite materialNanotechnologyChemistryOrganic chemistryProgramming languageComputer scienceMetal and Thin Film MechanicsSemiconductor materials and devicesMetallurgical and Alloy Processes