Si-based MEMS resonant sensor: A review from microfabrication perspective
Gulshan Verma, Kunal Mondal, Ankur Gupta
Topics & Concepts
MicrofabricationMicroelectromechanical systemsFabricationResonatorElectronicsMaterials scienceSiliconElectronic engineeringNanotechnologyEngineeringElectrical engineeringOptoelectronicsMedicinePathologyAlternative medicineAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies