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Effect of initial condition on the quality of GaN film and AlGaN/GaN heterojunction grown on flat sapphire substrate with ex-situ sputtered AlN by MOCVD

Zhaole Su, Rui Kong, Xiaotao Hu, Yimeng Song, Zhen Deng, Yang Jiang, Yangfeng Li, Hong Chen

2022Vacuum14 citationsDOI

Topics & Concepts

Materials scienceMetalorganic vapour phase epitaxyHeterojunctionSapphireOptoelectronicsLayer (electronics)DislocationSubstrate (aquarium)NitrideComposite materialEpitaxyOpticsLaserGeologyPhysicsOceanographyGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties
Effect of initial condition on the quality of GaN film and AlGaN/GaN heterojunction grown on flat sapphire substrate with ex-situ sputtered AlN by MOCVD | Litcius