In-situ Ar plasma treatment as a low thermal budget technique for high performance InGaSnO thin film transistors fabricated using magnetron sputtering
Mengzhen Hu, Lei Xu, Xinnan Zhang, Zengcai Song, Shijun Luo
Topics & Concepts
Materials scienceThreshold voltageX-ray photoelectron spectroscopyThin-film transistorPlasmaThin filmSputter depositionAnnealing (glass)OptoelectronicsSurface roughnessTransistorSputteringCavity magnetronAnalytical Chemistry (journal)VoltageNanotechnologyElectrical engineeringComposite materialNuclear magnetic resonanceChemistryPhysicsLayer (electronics)ChromatographyQuantum mechanicsEngineeringThin-Film Transistor TechnologiesZnO doping and propertiesNanowire Synthesis and Applications