The fabrication of ultra-wide bandgap GeO2 thin films by DC magnetron sputtering: The impacts of growth temperature and post-annealing process
Chengming Wei, Jia‐Bao Liu, Xinru Lan, Cheng Yang, Shuiping Huang, Xu Wang, Da Chen
Topics & Concepts
Materials scienceBand gapOptoelectronicsAnnealing (glass)Sputter depositionTetragonal crystal systemSapphireThin filmSemiconductorSputteringFabricationOpticsNanotechnologyPhase (matter)LaserChemistryMedicineOrganic chemistryPathologyPhysicsComposite materialAlternative medicineGa2O3 and related materialsHigh voltage insulation and dielectric phenomenaGaN-based semiconductor devices and materials