Molecular beam epitaxy of high-quality GaAs on Si (001) by multi-time thermal cycle annealing
Chen Jiang, Hao Liu, Zhuoliang Liu, Jihong Ye, Hao Zhai, Shuaicheng Liu, Jiacheng Lin, Qi Wang, Xiaomin Ren
Topics & Concepts
Molecular beam epitaxyMaterials scienceOptoelectronicsSiliconAnnealing (glass)EpitaxyDislocationSemiconductorSurface finishSurface roughnessNanotechnologyComposite materialLayer (electronics)Semiconductor Quantum Structures and DevicesPhotonic and Optical DevicesSemiconductor Lasers and Optical Devices