Low frequency noise characteristics of resistor- and Si MOSFET-type gas sensors fabricated on the same Si wafer with In2O3 sensing layer
Wonjun Shin, Gyuweon Jung, Seongbin Hong, Yujeong Jeong, Jinwoo Park, Dongkyu Jang, Byung‐Gook Park, Jong‐Ho Lee
Topics & Concepts
ResistorOptoelectronicsWaferNoise (video)Flicker noiseMaterials scienceNoise figureInfrasoundTransistorField-effect transistorIndiumFigure of meritLayer (electronics)Electrical engineeringCMOSNanotechnologyAcousticsPhysicsVoltageComputer scienceEngineeringAmplifierImage (mathematics)Artificial intelligenceGas Sensing Nanomaterials and SensorsSpectroscopy and Laser ApplicationsAcoustic Wave Resonator Technologies