Non-linear mechanics in resonant inertial micro sensors
Claudia Comi, Valentina Zega, Alberto Corigliano
Topics & Concepts
MicrosystemMicroelectromechanical systemsMechanical systemCoupling (piping)Mechanical engineeringReliability (semiconductor)Fictitious forceInternet of ThingsInertial frame of referenceComputer scienceFocus (optics)EngineeringPhysicsNanotechnologyMaterials scienceMechanicsClassical mechanicsEmbedded systemQuantum mechanicsPower (physics)OpticsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies