Thickness and porosity characterization in porous silicon photonic crystals: The etch-stop effect
Jackelyne L.M. Villanueva, Danilo Roque Huanca, Adhimar Flávio Oliveira
Topics & Concepts
Porous siliconMaterials sciencePorosityPhotonic crystalSiliconBand gapPorous mediumPhotonicsLayer (electronics)OptoelectronicsEtching (microfabrication)Composite materialSilicon Nanostructures and PhotoluminescencePhotonic Crystals and ApplicationsAnodic Oxide Films and Nanostructures