Effects of annealing conditions on structural and ferroelectric properties of CeO2-HfO2 solid solution thin films on InAs substrates fabricated by chemical solution deposition
Shuaizhi Zheng, Jing Chen, Zhaotong Liu, Puqi Hao, Qijun Yang, Binjian Zeng, Lu Yin, Yichun Zhou, Min Liao
Topics & Concepts
FerroelectricityAnnealing (glass)Materials scienceThin filmMonoclinic crystal systemOrthorhombic crystal systemSolid solutionOptoelectronicsPolarization (electrochemistry)Chemical engineeringAnalytical Chemistry (journal)NanotechnologyDielectricComposite materialCrystallographyCrystal structureMetallurgyChemistryOrganic chemistryPhysical chemistryEngineeringFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesElectronic and Structural Properties of Oxides