Phosphorus-doped nanocrystalline silicon-oxycarbide thin films
Sukalyan Shyam, Debajyoti Das
Topics & Concepts
Materials scienceCrystallinityPlasma-enhanced chemical vapor depositionNanocrystalline materialNanocrystalBand gapDopantDopingAnalytical Chemistry (journal)Grain sizeThin filmX-ray photoelectron spectroscopySubstrate (aquarium)SiliconNanotechnologyChemical engineeringOptoelectronicsChemistryComposite materialOceanographyChromatographyGeologyEngineeringThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceSilicon and Solar Cell Technologies