Novel green chemical mechanical polishing for an aluminum alloy and mechanisms interpreted by molecular dynamics simulations and measurements
Yubiao Li, Zhenyu Zhang, Xingqiao Deng, Hongxiu Zhou, Yang Gu, Chunjing Shi, Shihao Liu, Wei Wang, Wei Zhang
Topics & Concepts
Materials scienceChemical-mechanical planarizationAlloySurface roughnessPolishingAmorphous solidX-ray photoelectron spectroscopyAluminiumComposite materialSurface finishChemical engineeringMetallurgyCrystallographyChemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced Materials Characterization Techniques