Preparation of CeO2 particles via ionothermal synthesis and its application to chemical mechanical polishing

Chuandong Chen, Siyuan Zhao, Xiaopei Li, Taixing Tan, Wuping Liao, Hongpeng You, Hongpeng You

2024Colloids and Surfaces A Physicochemical and Engineering Aspects13 citationsDOI

Topics & Concepts

Materials sciencePolishingChemical engineeringIonic liquidParticle sizeChemical-mechanical planarizationParticle (ecology)Scanning electron microscopeNanotechnologyComposite materialOrganic chemistryCatalysisChemistryGeologyOceanographyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of Oxides