An adaptive Copula function-based framework for fault detection in semiconductor wafer fabrication
Hongwei Xu, Wei Qin, Yan‐Ning Sun, Youlong Lv, Jie Zhang
Topics & Concepts
Wafer fabricationCopula (linguistics)WaferComputer scienceReliability engineeringData miningSemiconductor device fabricationEngineeringArtificial intelligenceMathematicsEconometricsElectrical engineeringIndustrial Vision Systems and Defect DetectionAdvanced Statistical Process MonitoringFault Detection and Control Systems