Full-field measurement of residual stress in single-crystal diamond substrates based on Mueller matrix microscopy
Ziqing Li, Changcai Cui, Oriol Arteaga, Subiao Bian, Han Tong, Jing Lu, Xipeng Xu
Topics & Concepts
Materials scienceResidual stressGrindingBirefringenceDiamondMueller calculusOpticsStress fieldStress (linguistics)Diamond toolOptical microscopePolarization (electrochemistry)Composite materialDiamond turningScanning electron microscopeFinite element methodStructural engineeringScatteringPolarimetryChemistryPhilosophyLinguisticsPhysical chemistryEngineeringPhysicsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesForce Microscopy Techniques and Applications