Effects of Ge-related storage centers formation in Al2O3 enhancing the performance of floating gate memories
Ionel Stavarache, Ovidiu Cojocaru, Valentin‐Adrian Maraloiu, V. S. Teodorescu, T. Stoïca, Magdalena Lidia Ciurea
Topics & Concepts
High-resolution transmission electron microscopyAmorphous solidAnnealing (glass)Materials scienceSputter depositionNanocrystalTransmission electron microscopyAtmospheric temperature rangeAnalytical Chemistry (journal)OxideNanotechnologyChemical engineeringSputteringThin filmCrystallographyChemistryComposite materialMetallurgyEngineeringMeteorologyChromatographyPhysicsSemiconductor materials and devicesSilicon Nanostructures and PhotoluminescenceSemiconductor materials and interfaces