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Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

Ming Lyu, Jian Zhao, Najib Kacem, Bin Tang, Pengbo Liu, Jiahao Song, Heng Zhong, Yu Huang

2021Communications in Nonlinear Science and Numerical Simulation36 citationsDOI

Topics & Concepts

Harmonic balanceResonatorSensitivity (control systems)Nonlinear systemControl theory (sociology)PhysicsCoupling (piping)AliasingHarmonicAmplitudeAccelerometerLimit (mathematics)VoltageMicroelectromechanical systemsMechanicsAcousticsMathematical analysisMaterials scienceMathematicsComputer scienceOpticsElectronic engineeringQuantum mechanicsEngineeringArtificial intelligenceMetallurgyControl (management)UndersamplingMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator Technologies
Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation | Litcius