Electrical, morphological and structural properties of Ti ohmic contacts formed on n-type 4H–SiC by laser thermal annealing
C. Berger, Daniel Alquier, Micka Bah, Jean-François Michaud
Topics & Concepts
Ohmic contactMaterials scienceAnnealing (glass)TitaniumIrradiationContact resistanceLaserThermal conductionOptoelectronicsComposite materialAnalytical Chemistry (journal)MetallurgyOpticsLayer (electronics)ChromatographyChemistryNuclear physicsPhysicsSilicon Carbide Semiconductor TechnologiesSemiconductor materials and interfaces