Indium-gallium–zinc oxide (IGZO) thin-film gas sensors prepared via post-deposition high-pressure annealing for NO2 detection
Sunil Babu Eadi, Hyun-Jin Shin, Kim Thanh Nguyen, Ki-Woo Song, Hyun-Woong Choi, Seong-Hyun Kim, Hi-Doek Lee
Topics & Concepts
Annealing (glass)Materials scienceIndiumZincThin filmGalliumSputteringAnalytical Chemistry (journal)ElectrodeCrystallitePartial pressureOxygenOxideOptoelectronicsNanotechnologyMetallurgyChemistryChromatographyOrganic chemistryPhysical chemistryGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors