Design of electrostatic actuated MEMS biaxial scanning micro-mirror with serpentine structure
Dhrubajyoti Sadhukhan, Gajendra Prasad Singh
Topics & Concepts
GimbalMicroelectromechanical systemsOpticsVoltageTorsion (gastropod)Materials scienceFabricationRotation (mathematics)Torsion springElectrodePhysicsOptoelectronicsComputer scienceArtificial intelligenceMedicineQuantum mechanicsAlternative medicineClassical mechanicsPathologySurgeryAdvanced MEMS and NEMS TechnologiesPhotonic and Optical DevicesMechanical and Optical Resonators