16 × 4 Linear Solar-Blind UV Photoconductive Detector Array Based on β-Ga<sub>2</sub>O<sub>3</sub> Film
Yusong Zhi, Zeng Liu, Shaohui Zhang, Shan Li, Zuyong Yan, Peigang Li, Weihua Tang
Abstract
In this article, a 16×4 linear array of β-Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> -based metal-semiconductor-metal structured photodetector is described for solar-blind sensing operation at a wavelength of 254 nm. The β-Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> film is grown by using metal-organic chemical vapor deposition (MOCVD) equipment, and the photodetectors are finished in constructing with standard photolithography and ion beam sputtering procedures. The results show that the dark current ( I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">dark </sub> ), photo-to-dark current ratio (PDCR), photo responsivity (R), specific detectivity (D <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">*</sup> ), exterl quantum efficiency (EQE), and linear dynamic region (LDR) are 1.94 pA, 2.95 ×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">7</sup> , 139.56 A/W, 2.55 ×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">15</sup> Jones, 6.8 ×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4 %</sup> , and 149.4 dB, at 10 V bias and 2000 μW / cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> light intensity illumination. In addition, the standard deviation of R for this photodetector array is 10%. Overall, such a 16 ×4 linear array of β-Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> -based photodetector array makes a progress in the field of Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> photodetectors.