Numerical modeling of SiC by low-pressure chemical vapor deposition from methyltrichlorosilane
Kang Guan, Yong Gao, Qingfeng Zeng, Xingang Luan, Yi Zhang, Laifei Cheng, Jianqing Wu, Zhenya Lu
Topics & Concepts
Chemical vapor depositionChemical vapor infiltrationStoichiometryDeposition (geology)Materials scienceKineticsAnalytical Chemistry (journal)CeramicChemical engineeringChemistryComposite materialPhysical chemistryNanotechnologyEnvironmental chemistryPaleontologyPhysicsQuantum mechanicsBiologyEngineeringSedimentAdvanced ceramic materials synthesisThermal properties of materialsMetal and Thin Film Mechanics