Piezoelectric thin films for MEMS
Isaku Kanno, Jun Ouyang, Jun Akedo, Takeshi Yoshimura, Barbara Malič, Paul Muralt
Abstract
LC
Topics & Concepts
PiezoelectricityMicroelectromechanical systemsMaterials scienceThin filmOptoelectronicsNanotechnologyComposite materialAcoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric MaterialsGas Sensing Nanomaterials and Sensors