Optimization of co-sputtered zinc indium tin oxide-based MOSFET-type sensor for effective NO2 gas detection
Hunhee Shin, Jinwoo Park, Donghee Kim, Kangwook Choi, Min-Kyu Park, Joon Hwang, Seongi Lee, Young‐Chang Joo, Gyuweon Jung, Gyuweon Jung, Jong-Ho Lee
Topics & Concepts
IndiumZincTinIndium tin oxideMaterials scienceMOSFETOptoelectronicsInorganic chemistryNanotechnologyChemistryMetallurgyThin filmElectrical engineeringEngineeringVoltageTransistorGas Sensing Nanomaterials and SensorsZnO doping and propertiesThin-Film Transistor Technologies