Litcius/Paper detail

Surface modulation to enhance chemical mechanical polishing performance of sliced silicon carbide Si-face

Gaopan Chen, Jianguo Li, Jiangyou Long, Haimei Luo, Yan Zhou, Xiaozhu Xie, Guoshun Pan

2020Applied Surface Science75 citationsDOI

Topics & Concepts

PolishingMaterials scienceChemical-mechanical planarizationSilicon carbideSurface roughnessOxideMachiningCarbideSurface finishComposite materialMetallurgyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques
Surface modulation to enhance chemical mechanical polishing performance of sliced silicon carbide Si-face | Litcius