Performance of heterojunction solar cells with different intrinsic a-Si:H thin layers deposited by RF- and VHF-PECVD
Jianqiang Wang, Xiaoning Ru, Tianyu Ruan, Yunfei Hu, Yongzhe Zhang, Hui Yan
Topics & Concepts
Plasma-enhanced chemical vapor depositionMaterials scienceHeterojunctionPassivationMicrostructureEllipsometrySolar cellAmorphous siliconOptoelectronicsChemical vapor depositionFourier transform infrared spectroscopyInfraredCarrier lifetimeSiliconThin filmAnalytical Chemistry (journal)Crystalline siliconOpticsChemistryLayer (electronics)NanotechnologyComposite materialPhysicsChromatographyThin-Film Transistor TechnologiesSilicon and Solar Cell TechnologiesSilicon Nanostructures and Photoluminescence