Synthesis and properties of a series of sulfonate ester photoacid generators
Qixin Sun, Baicheng Feng, Zhendong Sun, R. S. H. LIU, Hongjiao Ding, Yan Jin
Abstract
A total of six sulfonate polymeric nonionic photoacid generators (PAGs) have been synthesised and subjected to comprehensive characterization for their application in photoresist materials.
Topics & Concepts
SulfonatePhotoresistPolymer chemistryChemistryMaterials scienceOrganic chemistrySodiumLayer (electronics)Photopolymerization techniques and applicationsPhotochromic and Fluorescence ChemistryAdvanced Polymer Synthesis and Characterization