Positive-tone chemically amplified photosensitive polyimides with controllable taper angles
Lizhe Wang, X-y. Cao, Bo Jia, L-l. Yuan, H-x. Yang, S-y. Yang
Topics & Concepts
PolyimideMaterials scienceComposite materialUltimate tensile strengthGlass transitionThermal stabilityElongationModulusPolymerChemical engineeringLayer (electronics)EngineeringSynthesis and properties of polymersSilicone and Siloxane ChemistryAdvanced Sensor and Energy Harvesting Materials