Machine learning algorithm for the structural design of MEMS resonators
Liutao Gu, Weiping Zhang, Haolin Lu, Yuting Wu, Chongyang Fan
Topics & Concepts
Thermoelastic dampingResonatorMicroelectromechanical systemsSensitivity (control systems)Artificial neural networkComputer scienceNoise (video)AlgorithmFinite element methodElectronic engineeringArtificial intelligenceEngineeringThermalMaterials scienceStructural engineeringPhysicsElectrical engineeringMeteorologyImage (mathematics)OptoelectronicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Fiber Optic Sensors