Synthesis and characterization of nanoporous copper thin films by magnetron sputtering and subsequent dealloying
Yu-Zhen Lee, Wang-You Zeng, I‐Chung Cheng
Topics & Concepts
NanoporousMaterials scienceNanoindenterCopperThin filmSputter depositionAlloyScanning electron microscopeCavity magnetronSputteringChemical engineeringYield (engineering)MetallurgyComposite materialNanotechnologyNanoindentationEngineeringNanoporous metals and alloysElectrocatalysts for Energy ConversionAnodic Oxide Films and Nanostructures