Litcius/Paper detail

Design and analysis of a novel compact XYZ parallel precision positioning stage

Yanlin Xie, Yangmin Li, Chi Fai Cheung, Zhiwei Zhu, Xigang Chen

2020Microsystem Technologies36 citationsDOI

Topics & Concepts

WorkspaceHingeDisplacement (psychology)StiffnessComputer scienceFinite element methodCompliant mechanismStiffness matrixPrecision engineeringBendingStage (stratigraphy)Structural engineeringTopology (electrical circuits)MathematicsEngineeringMiniaturizationGeologyArtificial intelligenceCombinatoricsPaleontologyPsychologyElectrical engineeringRobotPsychotherapistPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing Techniques