Design and analysis of a novel compact XYZ parallel precision positioning stage
Yanlin Xie, Yangmin Li, Chi Fai Cheung, Zhiwei Zhu, Xigang Chen
Topics & Concepts
WorkspaceHingeDisplacement (psychology)StiffnessComputer scienceFinite element methodCompliant mechanismStiffness matrixPrecision engineeringBendingStage (stratigraphy)Structural engineeringTopology (electrical circuits)MathematicsEngineeringMiniaturizationGeologyArtificial intelligenceCombinatoricsPaleontologyPsychologyElectrical engineeringRobotPsychotherapistPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing Techniques