Adaptive process control for crystal growth using machine learning for high-speed prediction: application to SiC solution growth
Yifan Dang, Can Zhu, Motoki Ikumi, Masaki Takaishi, Wancheng Yu, Wei Huang, Xinbo Liu, Kentaro Kutsukake, Shunta Harada, Miho Tagawa, Toru Ujihara
Abstract
A time-dependent recipe designed by an adaptive control method can consistently maintain the optimal growth conditions despite the unsteady growth environment.
Topics & Concepts
Process (computing)Crystal growthCrystal (programming language)Computer scienceMaterials scienceProcess engineeringArtificial intelligenceCrystallographyChemistryEngineeringOperating systemProgramming languageSilicon Carbide Semiconductor TechnologiesThin-Film Transistor TechnologiesSilicon and Solar Cell Technologies