Fluorinated MOF‐Based Hexafluoropropylene Nanotrap for Highly Efficient Purification of Octafluoropropane Electronic Specialty Gas
Mingze Zheng, Wenjuan Xue, Tongan Yan, Zefeng Jiang, Zhi Fang, Hongliang Huang, Chongli Zhong
Abstract
Abstract High‐purity octafluoropropane (C 3 F 8 ) electronic specialty gas is a key chemical raw material in semiconductor and integrated circuit manufacturing industry, while selective removal of hexafluoropropylene (C 3 F 6 ) impurity for C 3 F 8 purification is essential but a challenging task. Here we report a fluorinated cage‐like MOF Zn‐bzc‐CF 3 (bzc=5‐(trifluoromethyl)‐1H‐pyrazole‐4‐carboxylic acid) for C 3 F 6 /C 3 F 8 separation. The incorporation of −CF 3 groups not only provides suitable pore aperture size for highly efficient size‐exclusive C 3 F 6 /C 3 F 8 separation, but also creates hydrophobic microenvironments, endowing Zn‐bz‐CF 3 high chemical stability. Remarkably, Zn‐bzc‐CF 3 exhibits high C 3 F 6 adsorption capacity while excluding C 3 F 8 , achieving ideal molecular‐sieving C 3 F 6 /C 3 F 8 separation. Breakthrough experiments show that Zn‐bzc‐CF 3 can efficiently separate C 3 F 6 /C 3 F 8 mixture and high‐purity C 3 F 8 (99.9 %) can be obtained.