Raman spectroscopy analysis of the chemical structure of diamond-like carbon films deposited via high-frequency inclusion high-power impulse magnetron sputtering
Hiroyuki Fukue, Tatsuyuki Nakatani, Susumu Takabayashi, Tadayuki Okano, Masahide Kuroiwa, Shinsuke Kunitsugu, Hiroki Oota, Ken Yonezawa
Topics & Concepts
High-power impulse magnetron sputteringRaman spectroscopyMaterials scienceSputter depositionAnalytical Chemistry (journal)DiamondThin filmDiamond-like carbonRaman scatteringSputteringOptoelectronicsChemistryNanotechnologyOpticsComposite materialPhysicsChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsForce Microscopy Techniques and Applications