DeepSEM-Net: Enhancing SEM defect analysis in semiconductor manufacturing with a dual-branch CNN-Transformer architecture
Yibo Qiao, Zhouzhouzhou Mei, Yuening Luo, Yining Chen
Topics & Concepts
ArchitectureTransformerSemiconductor device fabricationSemiconductorDual (grammatical number)EngineeringMaterials scienceElectrical engineeringComputer architectureComputer scienceHistoryVoltageArtWaferLiteratureArchaeologyIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisElectron and X-Ray Spectroscopy Techniques