Nucleation and coalescence of tungsten disulfide layers grown by metalorganic chemical vapor deposition
Haonan Tang, Sergej Pasko, Simonas Krotkus, Thorsten Anders, Cornelia Wockel, Jan Mischke, Xiaochen Wang, Ben R. Conran, C. McAleese, K. B. K. Teo, Sreetama Banerjee, Henry Medina, P. Morin, Inge Asselberghs, Amir Ghiami, Annika Grundmann, Songyao Tang, Hleb Fiadziushkin, H. Kalisch, Andrei Vescan, Salim El Kazzi, A. Marty, Djordje Došenović, Hanako Okuno, Lucie Le Van‐Jodin, M. Heuken
Abstract
The nucleation of tungsten disulfide WS2 crystallites and coalescence behaviour of monolayer WS2 films grown on C-plane sapphire have been studied in a commercial AIXTRON close coupled showerhead metalorganic chemical vapor deposition (MOCVD) reactor using tungsten hexacarbonyl and di-tert-butyl sulfide as precursors. The influence of sapphire substrates offcut (both orientation and angle), as well as the substrate annealing conditions and growth temperature, on the nucleation and size of the WS2 domains has been investigated. A higher nucleation temperature combined with increased substrate annealing temperatures was found to promote an increase in the WS2 domain size. The dependence of surface coverage and coalescence behaviour of the WS2 domains on the growth duration has also been determined, allowing monolayer WS2 films with < 10 % bilayer to be obtained. Crystalline quality of the coalesced WS2 films has been assessed by grazing incidence XRD and misorientation mapping using 4D-scanning transmission electron microscopy, showing a slight in-plane misorientation of the crystallites in the WS2 monolayer. The electrical performance of the coalesced WS2 films was assessed using backgated TLM structures demonstrating mobility values of up to 5 cm2/Vs and a high Ion/Ioff ratio greater than 108.