Applications, materials, and fabrication of micro glass parts and devices: An overview
Hazem Hamed, Marwan Eldiasty, Seyed-Mahmoud Seyedi-Sahebari, Jana D. Abou-Ziki
Topics & Concepts
Microscale chemistryFabricationMicroelectronicsMaterials scienceNanotechnologyMicrofluidicsMiniaturizationMachiningOptical transparencySurface micromachiningOptoelectronicsAlternative medicineMathematicsPathologyMedicineMetallurgyMathematics educationNanofabrication and Lithography TechniquesElectrowetting and Microfluidic Technologies3D IC and TSV technologies