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High performance solar-blind photodetectors based on plasma-enhanced atomic layer deposition of thin Ga2O3 films annealed under different atmosphere

Yu‐Chang Chen, Ding-Bo Chen, Guang Zeng, Xiaoxi Li, Yuchun Li, Xuefeng Zhao, Na Chen, Ting‐Yun Wang, Yingguo Yang, David Wei Zhang, Hong-Liang Lü

2022Journal of Alloys and Compounds24 citationsDOI

Topics & Concepts

ResponsivityMaterials scienceAnnealing (glass)PhotodetectorAmorphous solidOptoelectronicsThin filmDark currentCrystalliteAtomic layer depositionNanotechnologyAnalytical Chemistry (journal)ChemistryMetallurgyCrystallographyChromatographyGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials
High performance solar-blind photodetectors based on plasma-enhanced atomic layer deposition of thin Ga2O3 films annealed under different atmosphere | Litcius