Thickness Dependence of crack initiation and propagation in stacks for piezoelectric microelectromechanical systems
Kathleen Coleman, Raúl Bermejo, Dominique Leguillon, Susan Trolier‐McKinstry
Topics & Concepts
Materials scienceComposite materialFracture mechanicsWeibull modulusPiezoelectricityWaferWeibull distributionMicroelectromechanical systemsThin filmBendingStress (linguistics)Fracture (geology)Stack (abstract data type)Flexural strengthOptoelectronicsProgramming languageNanotechnologyStatisticsPhilosophyComputer scienceMathematicsLinguisticsFerroelectric and Piezoelectric MaterialsAcoustic Wave Resonator TechnologiesUltrasonics and Acoustic Wave Propagation