Gas-Phase Chemical Reaction Mechanism in the Growth of AlN during High-Temperature MOCVD: A Thermodynamic Study
Jiadai An, Xianying Dai, Qian Zhang, Runqiu Guo, Lansheng Feng
Abstract
, which are easy to decompose into small molecules and likely to be the sources of AlN nanoparticles.
Topics & Concepts
Chemical vapor depositionPyrolysisMetalorganic vapour phase epitaxyEnthalpyChemical reactionChemistryReaction mechanismDensity functional theoryDecompositionPhase (matter)Quantum chemicalMoleculeThermodynamicsComputational chemistryOrganic chemistryLayer (electronics)PhysicsEpitaxyCatalysisGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsGa2O3 and related materials