Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application
Ranjith Punathil Meethal, Palwasha Jalalzai, Muskan, Sumit Kumar, Peter Jerome, Andreas Klipp, Tae‐Gon Kim, Jin-Goo Park
Topics & Concepts
AdsorptionChemical-mechanical planarizationCorrosionChemistryX-ray photoelectron spectroscopyMoleculeTungstenDielectric spectroscopyContact angleLangmuir adsorption modelInorganic chemistryMolecular orbitalCorrosion inhibitorElectrochemistryChemical engineeringMaterials sciencePhysical chemistryOrganic chemistryLayer (electronics)Composite materialElectrodeEngineeringCorrosion Behavior and InhibitionMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research