Enhancing manual inspection in semiconductor manufacturing with integrated augmented reality solutions
Chih‐Hsing Chu, Chen-Yu Weng, Yu-Tzu Chen
Topics & Concepts
Augmented realityManufacturing engineeringSemiconductor device fabricationEngineering drawingEngineeringIndustrial engineeringSystems engineeringComputer scienceReliability engineeringMechanical engineeringProcess engineeringArtificial intelligenceElectrical engineeringWaferManufacturing Process and OptimizationAugmented Reality ApplicationsRobot Manipulation and Learning