Conductive SnO2-x thin films deposited by thermal ALD with H2O reactant
Gyeong Ryul Lee, Minhyeong Seong, Seon-Chang Kim, Kyeongjin Pyeon, Roy B. Chung
Topics & Concepts
Materials scienceAtomic layer depositionAmorphous solidAnnealing (glass)Back end of lineElectron mobilityThin-film transistorOptoelectronicsChemical engineeringTransistorThin filmLayer (electronics)NanotechnologyComposite materialChemistryCrystallographyElectrical engineeringVoltageEngineeringZnO doping and propertiesGas Sensing Nanomaterials and SensorsSemiconductor materials and devices