Porous silicon membranes and their applications: Recent advances
Roselien Vercauteren, Gilles Scheen, Jean‐Pierre Raskin, Laurent A. Francis
Topics & Concepts
Porous siliconMicroelectronicsMicrofabricationNanotechnologySiliconMaterials scienceMembraneEngineeringFabricationEngineering physicsChemistryOptoelectronicsAlternative medicinePathologyBiochemistryMedicineSilicon Nanostructures and PhotoluminescenceNanowire Synthesis and ApplicationsSemiconductor materials and devices