Low-Temperature Deposition of Highly Conductive Aluminum Metal Films on Flexible Substrates Using Liquid Alane MOD Precursors
Samuel P. Douglas, Caroline E. Knapp
Abstract
is a better precursor, producing more conductive films, which is explained by its lower decomposition temperature and higher Al weight loading, indicating potential for significant industrial application.
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyPolyimideElectrical conductorChemical engineeringElectrical resistivity and conductivityDeposition (geology)MetalPolyethylene terephthalateScanning electron microscopeConductive polymerAluminiumPolymerNanotechnologyComposite materialMetallurgyElectrical engineeringSedimentLayer (electronics)EngineeringPaleontologyBiologyNanomaterials and Printing TechnologiesZnO doping and propertiesCopper Interconnects and Reliability