Effects of proton beam irradiation on the physical and chemical properties of IGTO thin films with different thicknesses for thin-film transistor applications
Mingyu Shin, Seong‐Hyun Hwang, Hyun-Seok Cha, Hwan-Seok Jeong, Dae‐Hwan Kim, Hyuck‐In Kwon
Topics & Concepts
Materials scienceThin-film transistorIrradiationThin filmX-ray photoelectron spectroscopyOptoelectronicsOxideProtonLayer (electronics)RadiationIndiumOpticsNanotechnologyNuclear magnetic resonanceMetallurgyPhysicsQuantum mechanicsNuclear physicsThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices